Technical Information

Product materials: Stainless steel, fused silica

Max operating temperature: 200°C

Max thermal gradient: 25°C per minute

UV/DUV/EUV grade optical properties:

• Flatness : λ/4

• UV transmission: >87.5% between 250 nm and 1320nm + 1620 nm and 1800 nm

• Parallel to less than 10 arc seconds

IR grade optical properties:

• Flatness : λ/10

• IR transmission: >87.5% between 820nm and 2820 nm

• Parallelism: less than 30 arc minutes

Anti-reflective coatings: Available on-demand. Add your requirements as a note.